Inventor

HALPIN MIKE

US13 patents

⚠️ This page may combine multiple inventors who share the name “HALPIN MIKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

6 patents

US9892908B2Feb 13, 2018

Process feed management for semiconductor substrate processing

ASM INC479 citations98

US7874726B2Jan 25, 2011

Thermocouple

ASM INC475 citations98

US6325858B1Dec 4, 2001

Long life high temperature process chamber

ASM INC596 citations96

US6068441AMay 30, 2000

Substrate transfer system for semiconductor processing equipment

ASM INC545 citations96

US7648579B2Jan 19, 2010

Substrate support system for reduced autodoping and backside deposition

ASM INC42 citations89

US10370761B2Aug 6, 2019

Pulsed valve manifold for atomic layer deposition

ASM INC9 citations84

DARABNIA BUZ

2 patents

US8616765B2Dec 31, 2013

Thermocouple

DARABNIA BUZ469 citations95

US8262287B2Sep 11, 2012

Thermocouple

DARABNIA BUZ9 citations80

DUNN TODD

1 patent

US9574268B1Feb 21, 2017

Pulsed valve manifold for atomic layer deposition

DUNN TODD510 citations98

PETTINGER FRED

1 patent

US9017481B1Apr 28, 2015

Process feed management for semiconductor substrate processing

PETTINGER FRED761 citations96

GOODMAN MATT G

1 patent

US8088225B2Jan 3, 2012

Substrate support system for reduced autodoping and backside deposition

GOODMAN MATT G17 citations86

ASM IP HOLDING BV

1 patent

US10832903B2Nov 10, 2020

Process feed management for semiconductor substrate processing

ASM IP HOLDING BV4 citations72

3DAM TECH LLC

1 patent

US10589354B2Mar 17, 2020

Systems and methods for depositing charged metal droplets onto a workpiece

3DAM TECH LLC0 citations32