Inventor
INADA TAKAO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “INADA TAKAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS10923368B2Feb 16, 2021
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD3 citations72
US11724235B2Aug 15, 2023
Mixing apparatus, mixing method and substrate processing system
TOKYO ELECTRON LTD2 citations71
US11309194B2Apr 19, 2022
Substrate liquid treatment apparatus
TOKYO ELECTRON LTD3 citations71
US11742226B2Aug 29, 2023
Substrate liquid processing apparatus
TOKYO ELECTRON LTD3 citations67
US10651061B2May 12, 2020
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD1 citations62
US12575350B2Mar 10, 2026
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US12068175B2Aug 20, 2024
Substrate processing apparatus, mixing method, and substrate processing method
TOKYO ELECTRON LTD0 citations61
US11257692B2Feb 22, 2022
Substrate processing apparatus, mixing method, and substrate processing method
TOKYO ELECTRON LTD0 citations61
US11087992B2Aug 10, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations61
US11075096B2Jul 27, 2021
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations61
US10643874B2May 5, 2020
Substrate liquid processing apparatus, substrate liquid processing method, and storage medium
TOKYO ELECTRON LTD1 citations61
US11424141B2Aug 23, 2022
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD0 citations49
US9224624B2Dec 29, 2015
Liquid processing method
TOKYO ELECTRON LTD0 citations48