Inventor
DASAI TAKAFUMI
JP3 patents
Patents
3 patentsUS12404580B2Sep 2, 2025
Tungsten silicide target member and method for manufacturing same, and method for manufacturing tungsten silicide film
JX NIPPON MINING & METALS CORP0 citations57
US11939647B2Mar 26, 2024
Tungsten target
JX NIPPON MINING & METALS CORP0 citations55
US11939661B2Mar 26, 2024
Tungsten sputtering target and method for manufacturing the same
JX NIPPON MINING & METALS CORP0 citations45