Inventor
TAKADA TADAKAZU
5 patents
Patents
5 patentsUS4352724AOct 5, 1982
Method of manufacturing a semiconductor device
FUJITSU LTD89 citations95
US4350563ASep 21, 1982
Dry etching of metal film
FUJITSU LTD43 citations91
US4654113AMar 31, 1987
Process for fabricating a semiconductor device
FUJITSU LTD39 citations87
US4547260AOct 15, 1985
Process for fabricating a wiring layer of aluminum or aluminum alloy on semiconductor devices
FUJITSU LTD26 citations80
US4545851AOct 8, 1985
Etching method for semiconductor devices
FUJITSU LTD14 citations71