Inventor
TOKITOMO KAZUO
5 patents
Patents
5 patentsUS4328262AMay 4, 1982
Method of manufacturing semiconductor devices having photoresist film as a permanent layer
FUJITSU LTD79 citations94
US4350563ASep 21, 1982
Dry etching of metal film
FUJITSU LTD43 citations91
US5126220AJun 30, 1992
Reticle for photolithographic patterning
FUJITSU LTD26 citations90
US4328263AMay 4, 1982
Method of manufacturing semiconductor devices using lift-off technique
FUJITSU LTD10 citations71
US5147742ASep 15, 1992
Photomask and fabrication of the same
FUJITSU LTD16 citations70