Inventor
SHIMKUNAS ALEXANDER R
US6 patents
Patents
6 patentsUS4668336AMay 26, 1987
Process for making a mask used in x-ray photolithography
MICRONIX CORP25 citations90
US4680243AJul 14, 1987
Method for producing a mask for use in X-ray photolithography and resulting structure
MICRONIX CORP21 citations81
US4696878ASep 29, 1987
Additive process for manufacturing a mask for use in X-ray photolithography and the resulting mask
MICRONIX CORP12 citations71
US4671850AJun 9, 1987
Mask using polyimide to support a patterned x-ray opaque layer
MICRONIX CORP11 citations71
US4608268AAug 26, 1986
Process for making a mask used in x-ray photolithography
MICRONIX CORP17 citations71
US4708919ANov 24, 1987
Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure
MICRONIX CORP16 citations65