Inventor

KERMANI AHMAD

US7 patents

⚠️ This page may combine multiple inventors who share the name “KERMANI AHMAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CVC PRODUCTS INC

2 patents

US5976261ANov 2, 1999

Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment

CVC PRODUCTS INC155 citations98

US5937142AAug 10, 1999

Multi-zone illuminator for rapid thermal processing

CVC PRODUCTS INC471 citations98

PEAK SYSTEMS INC

2 patents

US4984902AJan 15, 1991

Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing

PEAK SYSTEMS INC98 citations93

US4969748ANov 13, 1990

Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing

PEAK SYSTEMS INC66 citations93

PROCESSING TECHNOLOGIES INC AG

1 patent

US5324684AJun 28, 1994

Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure

PROCESSING TECHNOLOGIES INC AG118 citations97

CROWLEY JOHN L

1 patent

US4755654AJul 5, 1988

Semiconductor wafer heating chamber

CROWLEY JOHN L83 citations90

RAPRO TECHNOLOGY

1 patent

US5002630AMar 26, 1991

Method for high temperature thermal processing with reduced convective heat loss

RAPRO TECHNOLOGY88 citations89