Inventor

LASSIG STEPHAN E

US4 patents

⚠️ This page may combine multiple inventors who share the name “LASSIG STEPHAN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PEAK SYSTEMS INC

2 patents

US4984902AJan 15, 1991

Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing

PEAK SYSTEMS INC98 citations93

US4969748ANov 13, 1990

Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing

PEAK SYSTEMS INC66 citations93

IBM

1 patent

US5548470AAug 20, 1996

Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity

IBM89 citations95

CROWLEY JOHN L

1 patent

US4755654AJul 5, 1988

Semiconductor wafer heating chamber

CROWLEY JOHN L83 citations90