Inventor
JOHNSON NOEL H
US7 patents
⚠️ This page may combine multiple inventors who share the name “JOHNSON NOEL H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MRL IND
3 patentsPEAK SYSTEMS INC
2 patentsUS4984902AJan 15, 1991
Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
PEAK SYSTEMS INC98 citations93
US4969748ANov 13, 1990
Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
PEAK SYSTEMS INC66 citations93