Inventor
RICKORDS GARY R
US2 patents
Patents
2 patentsUS4984902AJan 15, 1991
Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
PEAK SYSTEMS INC98 citations93
US4969748ANov 13, 1990
Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
PEAK SYSTEMS INC66 citations93