P

Inventor

FOSTER JOHN S

US59 patents
⚠️ This page may combine multiple inventors who share the name “FOSTER JOHN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INNOVATIVE MICRO TECHNOLOGY

14 patents
US7220594B2May 22, 2007

Method and apparatus for sorting particles with a MEMS device

INNOVATIVE MICRO TECHNOLOGY76 citations97
US7229838B2Jun 12, 2007

MEMS actuator and method of manufacture for MEMS particle sorting device

INNOVATIVE MICRO TECHNOLOGY47 citations92
US7210352B2May 1, 2007

MEMS teeter-totter apparatus with curved beam and method of manufacture

INNOVATIVE MICRO TECHNOLOGY33 citations92
US7528691B2May 5, 2009

Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture

INNOVATIVE MICRO TECHNOLOGY32 citations87
US7893798B2Feb 22, 2011

Dual substrate MEMS plate switch and method of manufacture

INNOVATIVE MICRO TECHNOLOGY18 citations83
US7675162B2Mar 9, 2010

Interconnect structure using through wafer vias and method of fabrication

INNOVATIVE MICRO TECHNOLOGY17 citations83
US7864006B2Jan 4, 2011

MEMS plate switch and method of manufacture

INNOVATIVE MICRO TECHNOLOGY15 citations81
US7785913B2Aug 31, 2010

System and method for forming moveable features on a composite substrate

INNOVATIVE MICRO TECHNOLOGY11 citations81
US7141080B2Nov 28, 2006

Method and apparatus for assembling an array of micro-devices

INNOVATIVE MICRO TECHNOLOGY11 citations81
US7812703B2Oct 12, 2010

MEMS device using NiMn alloy and method of manufacture

INNOVATIVE MICRO TECHNOLOGY6 citations72
US7713786B2May 11, 2010

Etching/bonding chamber for encapsulated devices and method of use

INNOVATIVE MICRO TECHNOLOGY2 citations58
US7759152B2Jul 20, 2010

MEMS thermal actuator and method of manufacture

INNOVATIVE MICRO TECHNOLOGY0 citations52
US7622783B2Nov 24, 2009

MEMS thermal actuator and method of manufacture

INNOVATIVE MICRO TECHNOLOGY0 citations52
US8343791B2Jan 1, 2013

Plating process and apparatus for through wafer features

INNOVATIVE MICRO TECHNOLOGY1 citations51

IBM

11 patents

OWL BIOMEDICAL INC

10 patents

FOSTER JOHN S

9 patents

OPTICAL COATING LABORATORY INC

2 patents

US NAVY

2 patents

US ARMY

1 patent

CARLSON GREGORY A

1 patent

Showing the top 50 of 59 patents by PatentIndex Score.