Inventor
IWANAGA TAKEHIKO
JP10 patents
Patents
10 patentsUS5920398AJul 6, 1999
Surface position detecting method and scanning exposure method using the same
CANON KK43 citations92
US5581348ADec 3, 1996
Surface inspecting device using bisected multi-mode laser beam and system having the same
CANON KK46 citations92
US6396562B1May 28, 2002
Microdevice manufacturing apparatus
CANON KK32 citations91
US5347118ASep 13, 1994
Aligning method and apparatus detecting misalignment using image signals from image pickup
CANON KK21 citations91
US6909372B2Jun 21, 2005
Power monitoring unit, control method therefor, and exposure apparatus
CANON KK7 citations69
US6954259B2Oct 11, 2005
Scanning exposure apparatus
CANON KK2 citations61
US6816239B2Nov 9, 2004
Exposure apparatus, method of controlling same, and method of manufacturing devices
CANON KK3 citations61
US6788391B2Sep 7, 2004
Illumination device, exposure apparatus and exposure method
CANON KK4 citations61
US7072027B2Jul 4, 2006
Exposure apparatus, method of controlling same, and method of manufacturing devices
CANON KK1 citations50
US7046336B2May 16, 2006
Scanning exposure apparatus
CANON KK0 citations50