Inventor

FIORDALICE ROBERT W

US18 patents

⚠️ This page may combine multiple inventors who share the name “FIORDALICE ROBERT W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FIORDALICE ROBERT W

MOTOROLA INC

Method for forming inlaid interconnects in a semiconductor device

Method for forming a plug and semiconductor device having the same

Process for forming copper interconnect structure

Inert plasma gas surface cleaning process performed insitu with physical vapor deposition (PVD) of a layer of material

Method for forming a semiconductor device

Method of forming an interconnect structure

Method for providing trench isolation

Method for providing trench isolation and borderless contact

Method for making a semiconductor device having anti-reflective coating

Method for forming a conductive interconnect in an integrated circuit

Process for forming an intermetallic layer

Process for fabricating a metallization structure in a semiconductor device

Process for fabricating a metallized interconnect

Process for fabricating a metallized interconnect structure in a semiconductor device

Process for fabricating a collimated metal layer and contact structure in a semiconductor device

Semiconductor device having a titanium-aluminum compound

KLA TENCOR TECH CORP

Barrier enhancement

KLA TENCOR CORP

Barrier material formation in integrated circuit structures