Inventor
VERKUIL ROGER L
US25 patents
⚠️ This page may combine multiple inventors who share the name “VERKUIL ROGER L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
(unassigned)
12 patentsUS6191605B1Feb 20, 2001
Contactless method for measuring total charge of an insulating layer on a substrate using corona charge
111 citations98
US6104206AAug 15, 2000
Product wafer junction leakage measurement using corona and a kelvin probe
141 citations98
US6097196AAug 1, 2000
Non-contact tunnelling field measurement for a semiconductor oxide layer
116 citations98
US6072320AJun 6, 2000
Product wafer junction leakage measurement using light and eddy current
99 citations98
US6202029B1Mar 13, 2001
Non-contact electrical conduction measurement for insulating films
90 citations97
US6121783ASep 19, 2000
Method and apparatus for establishing electrical contact between a wafer and a chuck
103 citations95
US6060709AMay 9, 2000
Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
64 citations95
US6091257AJul 18, 2000
Vacuum activated backside contact
63 citations94
US6771092B1Aug 3, 2004
Non-contact mobile charge measurement with leakage band-bending and dipole correction
21 citations92
US6937050B1Aug 30, 2005
Non-contact mobile charge measurement with leakage band-bending and dipole correction
10 citations73
US6335630B2Jan 1, 2002
Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge
6 citations73
US6448804B2Sep 10, 2002
Contactless total charge measurement with corona
3 citations62
IBM
8 patentsUS5485091AJan 16, 1996
Contactless electrical thin oxide measurements
IBM197 citations99
US4812756AMar 14, 1989
Contactless technique for semicondutor wafer testing
IBM220 citations98
US5442297AAug 15, 1995
Contactless sheet resistance measurement method and apparatus
IBM62 citations96
US5216362AJun 1, 1993
Contactless technique for measuring epitaxial dopant concentration profiles in semiconductor wafers
IBM85 citations96
US5498974AMar 12, 1996
Contactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatus
IBM81 citations95
US3974486AAug 10, 1976
Multiplication mode bistable field effect transistor and memory utilizing same
IBM79 citations95
US5500607AMar 19, 1996
Probe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor wafer
IBM28 citations92
US6228665B1May 8, 2001
Method of measuring oxide thickness during semiconductor fabrication
IBM14 citations74
KEITHLEY INSTRUMENTS
4 patentsUS5767693AJun 16, 1998
Method and apparatus for measurement of mobile charges with a corona screen gun
KEITHLEY INSTRUMENTS105 citations98
US5594247AJan 14, 1997
Apparatus and method for depositing charge on a semiconductor wafer
KEITHLEY INSTRUMENTS120 citations98
US5834941ANov 10, 1998
Mobile charge measurement using corona charge and ultraviolet light
KEITHLEY INSTRUMENTS70 citations96
US6522158B1Feb 18, 2003
Non-contact mobile charge measurement with leakage band-bending and dipole correction
KEITHLEY INSTRUMENTS25 citations92