Inventor
MORIUMA HIROSHI
JP17 patents
Patents
17 patentsUS6835527B2Dec 28, 2004
Chemical amplifying type positive resist composition
SUMITOMO CHEMICAL CO48 citations92
US5424167AJun 13, 1995
Positive type quinonediazide resist composition containing alkali-soluble novolac resin and aromatic hydroxy compound additive
SUMITOMO CHEMICAL CO25 citations92
US5468590ANov 21, 1995
Positive resist composition
SUMITOMO CHEMICAL CO24 citations91
US5429904AJul 4, 1995
Positive resist composition
SUMITOMO CHEMICAL CO21 citations91
US6743885B2Jun 1, 2004
Resin composition for intermediate layer of three-layer resist
SUMITOMO CHEMICAL CO7 citations73
US6274287B1Aug 14, 2001
Positive resist compositions comprising a hydroxyphenyl ketone
SUMITOMO CHEMICAL CO12 citations73
US6068962AMay 30, 2000
Positive resist composition
SUMITOMO CHEMICAL CO14 citations73
US5275910AJan 4, 1994
Positive radiation-sensitive resist composition
SUMITOMO CHEMICAL CO8 citations73
US5188920AFeb 23, 1993
Positive resist composition containing 1,2-quinone diazide compound, alkali-soluble resin and polyhydroxy phenol additive compound
SUMITOMO CHEMICAL CO10 citations73
US5407780AApr 18, 1995
Radiation-sensitive positive resist composition comprising an alkali-soluble resin made from m-cresol, 2-tert-butl-5-methyl phenol and formaldehyde
SUMITOMO CHEMICAL CO8 citations72
US5451484ASep 19, 1995
Positive resist composition
SUMITOMO CHEMICAL CO9 citations71
US5849457ADec 15, 1998
Positive-working quinonediazide sulfonic acid ester resist composition utilizing solvent system including 2-heptanone, ethyl lactate, and γ-
SUMITOMO CHEMICAL CO12 citations69
US6767686B2Jul 27, 2004
Chemically amplifying type positive resist composition
SUMITOMO CHEMICAL CO5 citations62
US5326665AJul 5, 1994
Positive type resist composition
SUMITOMO CHEMICAL CO6 citations62
US6951706B2Oct 4, 2005
Sulfonate and resist composition
SUMITOMO CHEMICAL CO0 citations52
US6815140B2Nov 9, 2004
Positive resist composition
SUMITOMO CHEMICAL CO1 citations52
US7135268B2Nov 14, 2006
Amplification type positive resist composition
SUMITOMO CHEMICAL CO0 citations41