Inventor
ARGHAVANI REZA
US56 patents
⚠️ This page may combine multiple inventors who share the name “ARGHAVANI REZA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
25 patentsUS6617209B1Sep 9, 2003
Method for making a semiconductor device having a high-k gate dielectric
INTEL CORP132 citations99
US5780346AJul 14, 1998
N2 O nitrided-oxide trench sidewalls and method of making isolation structure
INTEL CORP141 citations99
US6620713B2Sep 16, 2003
Interfacial layer for gate electrode and high-k dielectric layer and methods of fabrication
INTEL CORP80 citations98
US6617210B1Sep 9, 2003
Method for making a semiconductor device having a high-k gate dielectric
INTEL CORP127 citations98
US6087236AJul 11, 2000
Integrated circuit with multiple gate dielectric structures
INTEL CORP94 citations98
US5827769AOct 27, 1998
Method for fabricating a transistor with increased hot carrier resistance by nitridizing and annealing the sidewall oxide of the gate electrode
INTEL CORP130 citations97
US6900481B2May 31, 2005
Non-silicon semiconductor and high-k gate dielectric metal oxide semiconductor field effect transistors
INTEL CORP64 citations96
US6610615B1Aug 26, 2003
Plasma nitridation for reduced leakage gate dielectric layers
INTEL CORP127 citations96
US6713358B1Mar 30, 2004
Method for making a semiconductor device having a high-k gate dielectric
INTEL CORP77 citations95
US6124171ASep 26, 2000
Method of forming gate oxide having dual thickness by oxidation process
INTEL CORP86 citations94
US7045073B2May 16, 2006
Pre-etch implantation damage for the removal of thin film layers
INTEL CORP22 citations93
US6261925B1Jul 17, 2001
N2O Nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress
INTEL CORP26 citations93
US6597046B1Jul 22, 2003
Integrated circuit with multiple gate dielectric structures
INTEL CORP38 citations92
US6667251B2Dec 23, 2003
Plasma nitridation for reduced leakage gate dielectric layers
INTEL CORP29 citations90
US7166505B2Jan 23, 2007
Method for making a semiconductor device having a high-k gate dielectric
INTEL CORP11 citations84
US7671414B2Mar 2, 2010
Semiconductor on insulator apparatus
INTEL CORP5 citations74
US7427538B2Sep 23, 2008
Semiconductor on insulator apparatus and method
INTEL CORP5 citations74
US6809017B2Oct 26, 2004
Interfacial layer for gate electrode and high-k dielectric layer and methods of fabrication
INTEL CORP8 citations74
US6566727B1May 20, 2003
N2O nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress
INTEL CORP4 citations74
US6221789B1Apr 24, 2001
Thin oxides of silicon
INTEL CORP9 citations74
US6667232B2Dec 23, 2003
Thin dielectric layers and non-thermal formation thereof
INTEL CORP6 citations73
US6707120B1Mar 16, 2004
Field effect transistor
INTEL CORP10 citations72
US6140251AOct 31, 2000
Method of processing a substrate
INTEL CORP9 citations72
US6514879B2Feb 4, 2003
Method and apparatus for dry/catalytic-wet steam oxidation of silicon
INTEL CORP7 citations68
US7875932B2Jan 25, 2011
Semiconductor on insulator apparatus
INTEL CORP1 citations63
APPLIED MATERIALS INC
12 patentsUS7253123B2Aug 7, 2007
Method for producing gate stack sidewall spacers
APPLIED MATERIALS INC253 citations98
US7018941B2Mar 28, 2006
Post treatment of low k dielectric films
APPLIED MATERIALS INC674 citations98
US7049200B2May 23, 2006
Method for forming a low thermal budget spacer
APPLIED MATERIALS INC233 citations97
US7087497B2Aug 8, 2006
Low-thermal-budget gapfill process
APPLIED MATERIALS INC54 citations96
US7678662B2Mar 16, 2010
Memory cell having stressed layers
APPLIED MATERIALS INC22 citations93
US7323391B2Jan 29, 2008
Substrate having silicon germanium material and stressed silicon nitride layer
APPLIED MATERIALS INC21 citations93
US7674727B2Mar 9, 2010
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill
APPLIED MATERIALS INC11 citations84
US7141483B2Nov 28, 2006
Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill
APPLIED MATERIALS INC11 citations84
US7816205B2Oct 19, 2010
Method of forming non-volatile memory having charge trap layer with compositional gradient
APPLIED MATERIALS INC5 citations74
US7955510B2Jun 7, 2011
Oxide etch with NH4-NF3 chemistry
APPLIED MATERIALS INC6 citations63
US7563680B2Jul 21, 2009
Substrate having silicon germanium material and stressed silicon nitride layer
APPLIED MATERIALS INC2 citations63
US7528051B2May 5, 2009
Method of inducing stresses in the channel region of a transistor
APPLIED MATERIALS INC3 citations63
LAM RES CORP
7 patentsUS9997357B2Jun 12, 2018
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
LAM RES CORP430 citations99
US9396961B2Jul 19, 2016
Integrated etch/clean for dielectric etch applications
LAM RES CORP105 citations96
US9153486B2Oct 6, 2015
CVD based metal/semiconductor OHMIC contact for high volume manufacturing applications
LAM RES CORP31 citations94
US10559468B2Feb 11, 2020
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
LAM RES CORP13 citations86
US9478411B2Oct 25, 2016
Method to tune TiOx stoichiometry using atomic layer deposited Ti film to minimize contact resistance for TiOx/Ti based MIS contact scheme for CMOS
LAM RES CORP7 citations84
US11011379B2May 18, 2021
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors
LAM RES CORP2 citations73
US10043672B2Aug 7, 2018
Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask
LAM RES CORP2 citations73
UNIV TOHOKU
2 patentsUS10796995B2Oct 6, 2020
Semiconductor devices including a first cobalt alloy in a first barrier layer and a second cobalt alloy in a second barrier layer
UNIV TOHOKU2 citations73
US11380619B2Jul 5, 2022
Semiconductor devices including cobalt alloys and fabrication methods thereof
UNIV TOHOKU0 citations63
INTEL COROPORATION
1 patentMIE FUJITSU SEMICONDUCTOR LTD
1 patentARGHAVANI REZA
1 patentBALSEANU MIHAELA
1 patentShowing the top 50 of 56 patents by PatentIndex Score.