P

Inventor

MCCLAY JAMES A

US5 patents
⚠️ This page may combine multiple inventors who share the name “MCCLAY JAMES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

3 patents
US7249925B2Jul 31, 2007

System and method for reticle protection and transport

ASML HOLDING NV14 citations90
US6991416B2Jan 31, 2006

System and method for reticle protection and transport

ASML HOLDING NV23 citations90
US6680794B2Jan 20, 2004

Polarization beam splitter for photolithography

ASML HOLDING NV17 citations90

SILICON VALLEY GROUP

1 patent
US6480330B1Nov 12, 2002

Ultraviolet polarization beam splitter for microlithography

SILICON VALLEY GROUP39 citations90

(unassigned)

1 patent
US6619903B2Sep 16, 2003

System and method for reticle protection and transport

33 citations89