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Inventor

WILKLOW RONALD A

US12 patents
⚠️ This page may combine multiple inventors who share the name “WILKLOW RONALD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

5 patents
US6680794B2Jan 20, 2004

Polarization beam splitter for photolithography

ASML HOLDING NV17 citations90
US7548370B2Jun 16, 2009

Layered structure for a tile wave plate assembly

ASML HOLDING NV10 citations82
US8013999B2Sep 6, 2011

Beam characterization monitor for sensing pointing or angle of an optical beam

ASML HOLDING NV0 citations51
US7414785B2Aug 19, 2008

Ultraviolet polarization beam splitter with minimum apodization

ASML HOLDING NV1 citations51
US7335398B2Feb 26, 2008

Method to modify the spatial response of a pattern generator

ASML HOLDING NV1 citations51

HELMUS PETER RICHARD

2 patents
US8902562B2Dec 2, 2014

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

HELMUS PETER RICHARD4 citations64
US9348236B2May 24, 2016

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

HELMUS PETER RICHARD1 citations42

ASML HOLDINGS N V

1 patent
US7081278B2Jul 25, 2006

Method for protection of adhesives used to secure optics from ultra-violet light

ASML HOLDINGS N V21 citations92

SILICON VALLEY GROUP

1 patent
US6480330B1Nov 12, 2002

Ultraviolet polarization beam splitter for microlithography

SILICON VALLEY GROUP39 citations90

WILKLOW RONALD A

1 patent
US8736810B2May 27, 2014

EUV reticle substrates with high thermal conductivity

WILKLOW RONALD A7 citations78

VLADIMIRSKY YULI

1 patent
US8558988B2Oct 15, 2013

Thin film continuous spatially modulated grey attenuators and filters

VLADIMIRSKY YULI2 citations61

HUGHES AIRCRAFT CO

1 patent
US5429732AJul 4, 1995

High rate ion beam sputtering process

HUGHES AIRCRAFT CO4 citations61