Inventor
KUECHEL MICHAEL
DE19 patents
⚠️ This page may combine multiple inventors who share the name “KUECHEL MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
11 patentsUS6879402B2Apr 12, 2005
Scanning interferometer for aspheric surfaces and wavefronts
ZYGO CORP53 citations92
US6714308B2Mar 30, 2004
Rapid in-situ mastering of an aspheric fizeau
ZYGO CORP26 citations92
US7948638B2May 24, 2011
Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts
ZYGO CORP12 citations84
US7612893B2Nov 3, 2009
Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts
ZYGO CORP11 citations84
US7218403B2May 15, 2007
Scanning interferometer for aspheric surfaces and wavefronts
ZYGO CORP9 citations73
US6816267B2Nov 9, 2004
Apparatus and method for calibrating an interferometer using a selectively rotatable sphere
ZYGO CORP8 citations73
US6734979B2May 11, 2004
Rapid in situ mastering of an aspheric Fizeau with residual error compensation
ZYGO CORP8 citations73
US6717679B2Apr 6, 2004
Dispersive null-optics for aspheric surface and wavefront metrology
ZYGO CORP12 citations73
US7889356B2Feb 15, 2011
Two grating lateral shearing wavefront sensor
ZYGO CORP6 citations62
US9234739B2Jan 12, 2016
In situ calibration of interferometers
ZYGO CORP2 citations57
US6876453B2Apr 5, 2005
Metrology system for precision 3D motion
ZYGO CORP5 citations56
ZEISS STIFTUNG
3 patentsUS4872755AOct 10, 1989
Interferometer for measuring optical phase differences
ZEISS STIFTUNG127 citations96
US5357341AOct 18, 1994
Method for evaluating interferograms and interferometer therefor
ZEISS STIFTUNG29 citations92
US5042041AAug 20, 1991
Radiation source for partially coherent radiation
ZEISS STIFTUNG1 citations51