Inventor
POHRAY VINAY
US7 patents
⚠️ This page may combine multiple inventors who share the name “POHRAY VINAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS7307025B1Dec 11, 2007
Lag control
LAM RES CORP26 citations91
US6909195B2Jun 21, 2005
Trench etch process for low-k dielectrics
LAM RES CORP16 citations91
US6875699B1Apr 5, 2005
Method for patterning multilevel interconnects
LAM RES CORP15 citations82
US6794293B2Sep 21, 2004
Trench etch process for low-k dielectrics
LAM RES CORP14 citations82
US7789991B1Sep 7, 2010
Lag control
LAM RES CORP4 citations61
US8470126B2Jun 25, 2013
Wiggling control for pseudo-hardmask
LAM RES CORP0 citations51