Inventor
CIRIGLIANO PETER
US15 patents
⚠️ This page may combine multiple inventors who share the name “CIRIGLIANO PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS7695632B2Apr 13, 2010
Critical dimension reduction and roughness control
LAM RES CORP14 citations92
US7294580B2Nov 13, 2007
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition
LAM RES CORP29 citations92
US6909195B2Jun 21, 2005
Trench etch process for low-k dielectrics
LAM RES CORP16 citations91
US7910489B2Mar 22, 2011
Infinitely selective photoresist mask etch
LAM RES CORP16 citations83
US7772122B2Aug 10, 2010
Sidewall forming processes
LAM RES CORP11 citations83
US7364623B2Apr 29, 2008
Confinement ring drive
LAM RES CORP13 citations83
US6780569B1Aug 24, 2004
Post-development treatment of patterned photoresist to promote cross-linking of polymer chains
LAM RES CORP13 citations83
US6794293B2Sep 21, 2004
Trench etch process for low-k dielectrics
LAM RES CORP14 citations82
US7682516B2Mar 23, 2010
Vertical profile fixing
LAM RES CORP6 citations63
US7491647B2Feb 17, 2009
Etch with striation control
LAM RES CORP3 citations63
US7396769B2Jul 8, 2008
Method for stripping photoresist from etched wafer
LAM RES CORP6 citations62