Inventor

JANIK GARY R

US29 patents

⚠️ This page may combine multiple inventors who share the name “JANIK GARY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JANIK GARY R

KLA TENCOR TECH CORP

Scatterometry metrology using inelastic scattering

Optical film topography and thickness measurement

Multi-technique thin film analysis tool

X-ray metrology using a transmissive x-ray optical element

Light element measurement

X-ray reflectivity measurement

Laser-based cleaning device for film analysis tool

Angle resolved x-ray detection

Electrical measurements on semiconductors using corona and microwave techniques

X-ray imaging for patterned film measurement

X-ray reflectivity system with variable spot

Laser-based cleaning device for film analysis tool

Patterned substrate surface mapping

Film measurement with interleaved laser cleaning

Methods and systems for preparing a sample for thin film analysis

Large collection angle x-ray monochromators for electron probe microanalysis

Dynamic measurement control

Method for measuring gate dielectric properties for three dimensional transistors

KLA TENCOR CORP

Multi-technique thin film analysis tool

Scatterometry metrology using inelastic scattering

Method and system for measuring deep trenches in silicon

Scatterometry metrology using inelastic scattering

WYATT TECHNOLOGY

Light scattering measurement cell for very small volumes

Extended range interferometric refractometer

Method and apparatus for reducing band broadening in chromatographic detectors

Apparatus to reduce inhomogeneities in optical flow cells

ELECTRIC POWER RES INST

Frequency modulation spectroscopy using dual frequency modulation and detection

WYATT TECHNOLOY CORP

Control of laser light power output for use in light scattering instruments by inducing mode hopping and averaging result

(unassigned)

Laser liquid flow cell manifold system and method for assembly