Inventor
PAN YANG
SG168 patents
⚠️ This page may combine multiple inventors who share the name “PAN YANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
31 patentsUS6300177B1Oct 9, 2001
Method to form transistors with multiple threshold voltages (VT) using a combination of different work function gate materials
CHARTERED SEMICONDUCTOR MFG175 citations99
US5595919AJan 21, 1997
Method of making self-aligned halo process for reducing junction capacitance
CHARTERED SEMICONDUCTOR MFG175 citations99
US6461900B1Oct 8, 2002
Method to form a self-aligned CMOS inverter using vertical device integration
CHARTERED SEMICONDUCTOR MFG141 citations98
US6313008B1Nov 6, 2001
Method to form a balloon shaped STI using a micro machining technique to remove heavily doped silicon
CHARTERED SEMICONDUCTOR MFG90 citations98
US5667424ASep 16, 1997
New chemical mechanical planarization (CMP) end point detection apparatus
CHARTERED SEMICONDUCTOR MFG125 citations98
US6747314B2Jun 8, 2004
Method to form a self-aligned CMOS inverter using vertical device integration
CHARTERED SEMICONDUCTOR MFG93 citations97
US6406945B1Jun 18, 2002
Method for forming a transistor gate dielectric with high-K and low-K regions
CHARTERED SEMICONDUCTOR MFG59 citations96
US6403485B1Jun 11, 2002
Method to form a low parasitic capacitance pseudo-SOI CMOS device
CHARTERED SEMICONDUCTOR MFG66 citations96
US5869396AFeb 9, 1999
Method for forming a polycide gate electrode
CHARTERED SEMICONDUCTOR MFG86 citations96
US5750435AMay 12, 1998
Method for minimizing the hot carrier effect in N-MOSFET devices
CHARTERED SEMICONDUCTOR MFG68 citations96
US5599726AFeb 4, 1997
Method of making a conductive spacer lightly doped drain (LDD) for hot carrier effect (HCE) control
CHARTERED SEMICONDUCTOR MFG47 citations96
US6159781ADec 12, 2000
Way to fabricate the self-aligned T-shape gate to reduce gate resistivity
CHARTERED SEMICONDUCTOR MFG60 citations95
US5667629ASep 16, 1997
Method and apparatus for determination of the end point in chemical mechanical polishing
CHARTERED SEMICONDUCTOR MFG75 citations95
US6709934B2Mar 23, 2004
Method for forming variable-K gate dielectric
CHARTERED SEMICONDUCTOR MFG26 citations93
US6511884B1Jan 28, 2003
Method to form and/or isolate vertical transistors
CHARTERED SEMICONDUCTOR MFG48 citations93
US6468877B1Oct 22, 2002
Method to form an air-gap under the edges of a gate electrode by using disposable spacer/liner
CHARTERED SEMICONDUCTOR MFG53 citations93
US6455377B1Sep 24, 2002
Method to form very high mobility vertical channel transistor by selective deposition of SiGe or multi-quantum wells (MQWs)
CHARTERED SEMICONDUCTOR MFG21 citations93
US6436770B1Aug 20, 2002
Method to control the channel length of a vertical transistor by first forming channel using selective epi and source/drain using implantation
CHARTERED SEMICONDUCTOR MFG45 citations93
US6417056B1Jul 9, 2002
Method to form low-overlap-capacitance transistors by forming microtrench at the gate edge
CHARTERED SEMICONDUCTOR MFG51 citations93
US6306715B1Oct 23, 2001
Method to form smaller channel with CMOS device by isotropic etching of the gate materials
CHARTERED SEMICONDUCTOR MFG46 citations93
US6300653B1Oct 9, 2001
Method for forming a high areal capacitance planar capacitor
CHARTERED SEMICONDUCTOR MFG22 citations93
US5814863ASep 29, 1998
Substrate with gate electrode polysilicon/gate oxide stack covered with fluorinated silicon oxide layer and fluorinated corners of gate oxide layer
CHARTERED SEMICONDUCTOR MFG22 citations93
US5813664ASep 29, 1998
Back-end capacitor with high unit capacitance
CHARTERED SEMICONDUCTOR MFG25 citations93
US5760435AJun 2, 1998
Use of spacers as floating gates in EEPROM with doubled storage efficiency
CHARTERED SEMICONDUCTOR MFG44 citations93
US5691252ANov 25, 1997
Method of making low profile shallow trench double polysilicon capacitor
CHARTERED SEMICONDUCTOR MFG18 citations93
US5672525ASep 30, 1997
Polysilicon gate reoxidation in a gas mixture of oxygen and nitrogen trifluoride gas by rapid thermal processing to improve hot carrier immunity
CHARTERED SEMICONDUCTOR MFG34 citations93
US5670410ASep 23, 1997
Method of forming integrated CMP stopper and analog capacitor
CHARTERED SEMICONDUCTOR MFG46 citations93
US5652177AJul 29, 1997
Method for fabricating a planar field oxide region
CHARTERED SEMICONDUCTOR MFG21 citations93
US6291307B1Sep 18, 2001
Method and structure to make planar analog capacitor on the top of a STI structure
CHARTERED SEMICONDUCTOR MFG36 citations92
US6566208B2May 20, 2003
Method to form elevated source/drain using poly spacer
CHARTERED SEMICONDUCTOR MFG22 citations89
US6297106B1Oct 2, 2001
Transistors with low overlap capacitance
CHARTERED SEMICONDUCTOR MFG46 citations87
LAM RES CORP
7 patentsUS12105422B2Oct 1, 2024
Photoresist development with halide chemistries
LAM RES CORP13 citations94
US11322351B2May 3, 2022
Tin oxide films in semiconductor device manufacturing
LAM RES CORP15 citations94
US10546748B2Jan 28, 2020
Tin oxide films in semiconductor device manufacturing
LAM RES CORP25 citations94
US10269566B2Apr 23, 2019
Etching substrates using ale and selective deposition
LAM RES CORP15 citations94
US12094711B2Sep 17, 2024
Tin oxide films in semiconductor device manufacturing
LAM RES CORP5 citations86
US12278125B2Apr 15, 2025
Integrated dry processes for patterning radiation photoresist patterning
LAM RES CORP8 citations85
US11355353B2Jun 7, 2022
Tin oxide mandrels in patterning
LAM RES CORP15 citations85
INVENSENSE INC
2 patentsPAN YANG
2 patentsUS8850495B2Sep 30, 2014
Advertisement delivering system based on digital television system and mobile communication device
PAN YANG47 citations94
US8464289B2Jun 11, 2013
Delivering personalized media items to users of interactive television and personal mobile devices by using scrolling tickers
PAN YANG29 citations93
MILLENNIUM BIOTHERAPEUTICS INC
2 patentsHUAWEI DEVICE CO LTD
1 patent(unassigned)
1 patentCHARTERED SEMICONDUCTOR MFG CO
1 patentCHARTERED SEMICONDUCTOR
1 patentMILLENIUM BIOTHERAPEUTICS INC
1 patentCHARTERED SEMICONDUCTION MANUF
1 patentShowing the top 50 of 168 patents by PatentIndex Score.