Inventor
TOMITA SHINICHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “TOMITA SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS7755045B2Jul 13, 2010
Scanning electron microscope
HITACHI HIGH TECH CORP14 citations83
US8026491B2Sep 27, 2011
Charged particle beam apparatus and method for charged particle beam adjustment
HITACHI HIGH TECH CORP9 citations80
US10008361B2Jun 26, 2018
Charged particle beam device and installation method
HITACHI HIGH TECH CORP0 citations46
US9053902B2Jun 9, 2015
Charged-particle radiation apparatus
HITACHI HIGH TECH CORP1 citations46
SUMCO CORP
4 patentsUS7528049B2May 5, 2009
Method for manufacturing bonded SOI wafer and bonded SOI wafer manufactured thereby
SUMCO CORP9 citations83
US7902039B2Mar 8, 2011
Method for manufacturing silicon wafer
SUMCO CORP6 citations71
US7442992B2Oct 28, 2008
Bonded SOI substrate, and method for manufacturing the same
SUMCO CORP8 citations65
US7781313B2Aug 24, 2010
Method for manufacturing silicon wafer
SUMCO CORP2 citations60