Inventor
HALL LINDSEY H
US19 patents
⚠️ This page may combine multiple inventors who share the name “HALL LINDSEY H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
16 patentsUS6656748B2Dec 2, 2003
FeRAM capacitor post stack etch clean/repair
TEXAS INSTRUMENTS INC196 citations99
US7220600B2May 22, 2007
Ferroelectric capacitor stack etch cleaning methods
TEXAS INSTRUMENTS INC35 citations92
US6048406AApr 11, 2000
Benign method for etching silicon dioxide
TEXAS INSTRUMENTS INC25 citations91
US6372648B1Apr 16, 2002
Integrated circuit planarization method
TEXAS INSTRUMENTS INC24 citations90
US7253049B2Aug 7, 2007
Method for fabricating dual work function metal gates
TEXAS INSTRUMENTS INC19 citations84
US7422967B2Sep 9, 2008
Method for manufacturing a semiconductor device containing metal silicide regions
TEXAS INSTRUMENTS INC15 citations82
US6294145B1Sep 25, 2001
Piranha etch preparation having long shelf life and method of making same
TEXAS INSTRUMENTS INC8 citations67
US7799582B2Sep 21, 2010
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean
TEXAS INSTRUMENTS INC1 citations62
US7252773B2Aug 7, 2007
Clean for high density capacitors
TEXAS INSTRUMENTS INC4 citations62
US7371691B2May 13, 2008
Silicon recess improvement through improved post implant resist removal and cleans
TEXAS INSTRUMENTS INC3 citations61
US6145372ANov 14, 2000
Apparatus and method for detecting impurities in wet chemicals
TEXAS INSTRUMENTS INC2 citations56
US8053252B2Nov 8, 2011
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean
TEXAS INSTRUMENTS INC0 citations52
US7572698B2Aug 11, 2009
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean
TEXAS INSTRUMENTS INC0 citations52
US7228865B2Jun 12, 2007
FRAM capacitor stack clean
TEXAS INSTRUMENTS INC0 citations52
US7723199B2May 25, 2010
Method for cleaning post-etch noble metal residues
TEXAS INSTRUMENTS INC0 citations51
US7517779B2Apr 14, 2009
Recessed drain extensions in transistor device
TEXAS INSTRUMENTS INC0 citations51