P

Inventor

HALL LINDSEY H

US19 patents
⚠️ This page may combine multiple inventors who share the name “HALL LINDSEY H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEXAS INSTRUMENTS INC

16 patents
US6656748B2Dec 2, 2003

FeRAM capacitor post stack etch clean/repair

TEXAS INSTRUMENTS INC196 citations99
US7220600B2May 22, 2007

Ferroelectric capacitor stack etch cleaning methods

TEXAS INSTRUMENTS INC35 citations92
US6048406AApr 11, 2000

Benign method for etching silicon dioxide

TEXAS INSTRUMENTS INC25 citations91
US6372648B1Apr 16, 2002

Integrated circuit planarization method

TEXAS INSTRUMENTS INC24 citations90
US7253049B2Aug 7, 2007

Method for fabricating dual work function metal gates

TEXAS INSTRUMENTS INC19 citations84
US7422967B2Sep 9, 2008

Method for manufacturing a semiconductor device containing metal silicide regions

TEXAS INSTRUMENTS INC15 citations82
US6294145B1Sep 25, 2001

Piranha etch preparation having long shelf life and method of making same

TEXAS INSTRUMENTS INC8 citations67
US7799582B2Sep 21, 2010

Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean

TEXAS INSTRUMENTS INC1 citations62
US7252773B2Aug 7, 2007

Clean for high density capacitors

TEXAS INSTRUMENTS INC4 citations62
US7371691B2May 13, 2008

Silicon recess improvement through improved post implant resist removal and cleans

TEXAS INSTRUMENTS INC3 citations61
US6145372ANov 14, 2000

Apparatus and method for detecting impurities in wet chemicals

TEXAS INSTRUMENTS INC2 citations56
US8053252B2Nov 8, 2011

Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean

TEXAS INSTRUMENTS INC0 citations52
US7572698B2Aug 11, 2009

Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean

TEXAS INSTRUMENTS INC0 citations52
US7228865B2Jun 12, 2007

FRAM capacitor stack clean

TEXAS INSTRUMENTS INC0 citations52
US7723199B2May 25, 2010

Method for cleaning post-etch noble metal residues

TEXAS INSTRUMENTS INC0 citations51
US7517779B2Apr 14, 2009

Recessed drain extensions in transistor device

TEXAS INSTRUMENTS INC0 citations51

(unassigned)

1 patent

IBM

1 patent

HALL LINDSEY H

1 patent