Inventor
OISHI SATORU
JP33 patents
⚠️ This page may combine multiple inventors who share the name “OISHI SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
27 patentsUS6992780B2Jan 31, 2006
Position detecting method and apparatus, exposure apparatus and device manufacturing method
CANON KK26 citations93
US6992767B2Jan 31, 2006
Management system, apparatus, and method, exposure apparatus, and control method therefor
CANON KK21 citations93
US6785583B2Aug 31, 2004
Management system and apparatus, method therefor, and device manufacturing method
CANON KK19 citations93
US7173716B2Feb 6, 2007
Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices
CANON KK15 citations84
US7148973B2Dec 12, 2006
Position detecting method and apparatus, exposure apparatus and device manufacturing method
CANON KK12 citations84
US7385700B2Jun 10, 2008
Management system, apparatus, and method, exposure apparatus, and control method therefor
CANON KK8 citations74
US7247868B2Jul 24, 2007
Position detection method and apparatus
CANON KK6 citations74
US7110116B2Sep 19, 2006
Alignment apparatus, exposure apparatus using same, and method of manufacturing devices
CANON KK9 citations74
US7075618B2Jul 11, 2006
Apparatus control system, apparatus control method, semiconductor exposure apparatus, semiconductor exposure apparatus control method and semiconductor device manufacturing method
CANON KK9 citations74
US7069104B2Jun 27, 2006
Management system, management apparatus, management method, and device manufacturing method
CANON KK7 citations74
US5910843AJun 8, 1999
Positioning apparatus and method thereof, and exposure apparatus
CANON KK9 citations74
US10420461B2Sep 24, 2019
Image generating apparatus, image generating method, and storage medium
CANON KK2 citations73
US7952725B2May 31, 2011
Surface shape measurement apparatus and exposure apparatus
CANON KK2 citations63
US7443493B2Oct 28, 2008
Transfer characteristic calculation apparatus, transfer characteristic calculation method, and exposure apparatus
CANON KK5 citations63
US7373213B2May 13, 2008
Management system and apparatus, method therefor, and device manufacturing method
CANON KK3 citations63
US7352891B2Apr 1, 2008
Position detecting method
CANON KK4 citations63
US7313873B2Jan 1, 2008
Surface position measuring method, exposure apparatus, and device manufacturing method
CANON KK2 citations63
US7067826B2Jun 27, 2006
Position detection method and apparatus
CANON KK4 citations63
US7035759B2Apr 25, 2006
Position detecting method and apparatus
CANON KK5 citations63
US7010380B2Mar 7, 2006
Management system, management method and apparatus, and management apparatus control method
CANON KK2 citations63
US6914666B2Jul 5, 2005
Method and system for optimizing parameter value in exposure apparatus and exposure apparatus and method
CANON KK3 citations63
US9606460B2Mar 28, 2017
Lithography apparatus, and method of manufacturing article
CANON KK0 citations52
US7983472B2Jul 19, 2011
Position detecting method
CANON KK0 citations52
US7865328B2Jan 4, 2011
Position detecting method and apparatus
CANON KK0 citations52
US7710543B2May 4, 2010
Scanning exposure apparatus and device manufacturing method
CANON KK1 citations52
US9001387B2Apr 7, 2015
Drawing apparatus, data processing method, and method of manufacturing article that transform partially overlapping regions using different transformation rules
CANON KK0 citations45
US7916271B2Mar 29, 2011
Apparatus and method for specifying correlation, exposure apparatus, and device manufacturing method
CANON KK0 citations42
OISHI SATORU
3 patentsUS8976337B2Mar 10, 2015
Method of measuring mark position and measuring apparatus
OISHI SATORU0 citations48
US8532366B2Sep 10, 2013
Position detecting method
OISHI SATORU0 citations48
US8097473B2Jan 17, 2012
Alignment method, exposure method, pattern forming method, and exposure apparatus
OISHI SATORU0 citations38