P

Inventor

KAACK TORSTEN R

US7 patents
⚠️ This page may combine multiple inventors who share the name “KAACK TORSTEN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

4 patents
US11378451B2Jul 5, 2022

Bandgap measurements of patterned film stacks using spectroscopic metrology

KLA TENCOR CORP3 citations70
US9110020B2Aug 18, 2015

Atmospheric molecular contamination control with local purging

KLA TENCOR CORP0 citations45
US7903250B1Mar 8, 2011

Control by sample reflectivity

KLA TENCOR CORP0 citations45
US7453562B1Nov 18, 2008

Ellipsometry measurement and analysis

KLA TENCOR CORP1 citations45

KAACK TORSTEN R

1 patent
US9625823B1Apr 18, 2017

Calculation method for local film stress measurements using local film thickness values

KAACK TORSTEN R7 citations72

KLA CORP

1 patent
US11796390B2Oct 24, 2023

Bandgap measurements of patterned film stacks using spectroscopic metrology

KLA CORP0 citations59

KWAK HIDONG

1 patent
US9046474B2Jun 2, 2015

Multi-analyzer angle spectroscopic ellipsometry

KWAK HIDONG2 citations57