P

Inventor

KRISHNAN SHANKAR

US123 patents
⚠️ This page may combine multiple inventors who share the name “KRISHNAN SHANKAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

19 patents
US9470639B1Oct 18, 2016

Optical metrology with reduced sensitivity to grating anomalies

KLA TENCOR CORP31 citations93
US9228943B2Jan 5, 2016

Dynamically adjustable semiconductor metrology system

KLA TENCOR CORP31 citations93
US8860937B1Oct 14, 2014

Metrology systems and methods for high aspect ratio and large lateral dimension structures

KLA TENCOR CORP35 citations93
US7907264B1Mar 15, 2011

Measurement of thin film porosity

KLA TENCOR CORP29 citations93
US7755764B2Jul 13, 2010

Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry

KLA TENCOR CORP40 citations92
US9310290B2Apr 12, 2016

Multiple angles of incidence semiconductor metrology systems and methods

KLA TENCOR CORP18 citations90
US8040511B1Oct 18, 2011

Azimuth angle measurement

KLA TENCOR CORP37 citations90
US10145674B2Dec 4, 2018

Measurement of semiconductor structures with capillary condensation

KLA TENCOR CORP7 citations84
US9952140B2Apr 24, 2018

Small spot size spectroscopic ellipsometer

KLA TENCOR CORP8 citations84
US9816810B2Nov 14, 2017

Measurement of multiple patterning parameters

KLA TENCOR CORP11 citations84
US9490182B2Nov 8, 2016

Measurement of multiple patterning parameters

KLA TENCOR CORP12 citations84
US10438825B2Oct 8, 2019

Spectral reflectometry for in-situ process monitoring and control

KLA TENCOR CORP8 citations83
US9921104B2Mar 20, 2018

Simultaneous multi-angle spectroscopy

KLA TENCOR CORP9 citations82
US9116103B2Aug 25, 2015

Multiple angles of incidence semiconductor metrology systems and methods

KLA TENCOR CORP7 citations82
US10612916B2Apr 7, 2020

Measurement of multiple patterning parameters

KLA TENCOR CORP4 citations73
US10281263B2May 7, 2019

Critical dimension measurements with gaseous adsorption

KLA TENCOR CORP6 citations73
US10215693B2Feb 26, 2019

Infrared spectroscopic reflectometer for measurement of high aspect ratio structures

KLA TENCOR CORP4 citations73
US10041873B2Aug 7, 2018

Porosity measurement of semiconductor structures

KLA TENCOR CORP6 citations73
US9921152B2Mar 20, 2018

Systems and methods for extended infrared spectroscopic ellipsometry

KLA TENCOR CORP5 citations73

QUALCOMM INC

10 patents

KLA TENCOR TECH CORP

4 patents

KLA CORP

3 patents

INTEL CORP

2 patents

KRISHNAN SHANKAR

2 patents

BATTELLE MEMORIAL INSTITUTE

2 patents

HOUSTON ADVANCED RES CENTER

1 patent

WANG HAIMING

1 patent

CONTAINERLESS RESEARCH INC

1 patent

AT & T IP II LP

1 patent

AT & T CORP

1 patent

ALCATEL LUCENT USA INC

1 patent

WEGENG ROBERT S

1 patent

NORTH STEPHEN C

1 patent

Showing the top 50 of 123 patents by PatentIndex Score.