Inventor
KRISHNAN SHANKAR
US123 patents
⚠️ This page may combine multiple inventors who share the name “KRISHNAN SHANKAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
19 patentsUS9470639B1Oct 18, 2016
Optical metrology with reduced sensitivity to grating anomalies
KLA TENCOR CORP31 citations93
US9228943B2Jan 5, 2016
Dynamically adjustable semiconductor metrology system
KLA TENCOR CORP31 citations93
US8860937B1Oct 14, 2014
Metrology systems and methods for high aspect ratio and large lateral dimension structures
KLA TENCOR CORP35 citations93
US7907264B1Mar 15, 2011
Measurement of thin film porosity
KLA TENCOR CORP29 citations93
US7755764B2Jul 13, 2010
Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry
KLA TENCOR CORP40 citations92
US9310290B2Apr 12, 2016
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP18 citations90
US8040511B1Oct 18, 2011
Azimuth angle measurement
KLA TENCOR CORP37 citations90
US10145674B2Dec 4, 2018
Measurement of semiconductor structures with capillary condensation
KLA TENCOR CORP7 citations84
US9952140B2Apr 24, 2018
Small spot size spectroscopic ellipsometer
KLA TENCOR CORP8 citations84
US9816810B2Nov 14, 2017
Measurement of multiple patterning parameters
KLA TENCOR CORP11 citations84
US9490182B2Nov 8, 2016
Measurement of multiple patterning parameters
KLA TENCOR CORP12 citations84
US10438825B2Oct 8, 2019
Spectral reflectometry for in-situ process monitoring and control
KLA TENCOR CORP8 citations83
US9921104B2Mar 20, 2018
Simultaneous multi-angle spectroscopy
KLA TENCOR CORP9 citations82
US9116103B2Aug 25, 2015
Multiple angles of incidence semiconductor metrology systems and methods
KLA TENCOR CORP7 citations82
US10612916B2Apr 7, 2020
Measurement of multiple patterning parameters
KLA TENCOR CORP4 citations73
US10281263B2May 7, 2019
Critical dimension measurements with gaseous adsorption
KLA TENCOR CORP6 citations73
US10215693B2Feb 26, 2019
Infrared spectroscopic reflectometer for measurement of high aspect ratio structures
KLA TENCOR CORP4 citations73
US10041873B2Aug 7, 2018
Porosity measurement of semiconductor structures
KLA TENCOR CORP6 citations73
US9921152B2Mar 20, 2018
Systems and methods for extended infrared spectroscopic ellipsometry
KLA TENCOR CORP5 citations73
QUALCOMM INC
10 patentsUS11916754B2Feb 27, 2024
Configuring a user equipment for machine learning
QUALCOMM INC7 citations86
US12439286B2Oct 7, 2025
Application, services, and network slice based measurements for minimization of drive test reporting
QUALCOMM INC3 citations75
US12245051B2Mar 4, 2025
Data collection reporting for non-terrestrial network cells
QUALCOMM INC1 citations75
US12238602B2Feb 25, 2025
AI/ML based mobility related prediction for handover
QUALCOMM INC2 citations75
US12185423B2Dec 31, 2024
Performance indicators for combinations of machine learning models
QUALCOMM INC3 citations75
US12089291B2Sep 10, 2024
Machine learning model configuration in wireless networks
QUALCOMM INC3 citations75
US11956677B2Apr 9, 2024
Quality of experience measurement and reporting
QUALCOMM INC3 citations75
US11812316B2Nov 7, 2023
Handover optimization based on UE mobility prediction
QUALCOMM INC2 citations73
US11729697B2Aug 15, 2023
Integrated access and backhaul data collection
QUALCOMM INC2 citations73
US11424962B2Aug 23, 2022
Model discovery and selection for cooperative machine learning in cellular networks
QUALCOMM INC4 citations73
KLA TENCOR TECH CORP
4 patentsUS7277172B2Oct 2, 2007
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals
KLA TENCOR TECH CORP34 citations92
US7274440B1Sep 25, 2007
Systems and methods for measuring stress in a specimen
KLA TENCOR TECH CORP21 citations92
US7408641B1Aug 5, 2008
Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
KLA TENCOR TECH CORP20 citations91
US7006222B2Feb 28, 2006
Concurrent measurement and cleaning of thin films on silicon-on-insulator (SOI)
KLA TENCOR TECH CORP18 citations84
KLA CORP
3 patentsINTEL CORP
2 patentsKRISHNAN SHANKAR
2 patentsBATTELLE MEMORIAL INSTITUTE
2 patentsHOUSTON ADVANCED RES CENTER
1 patentWANG HAIMING
1 patentCONTAINERLESS RESEARCH INC
1 patentAT & T IP II LP
1 patentAT & T CORP
1 patentALCATEL LUCENT USA INC
1 patentWEGENG ROBERT S
1 patentNORTH STEPHEN C
1 patentShowing the top 50 of 123 patents by PatentIndex Score.