Inventor

HUANG YONGZHANG

US18 patents

⚠️ This page may combine multiple inventors who share the name “HUANG YONGZHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUANG YONGZHANG

AXCELIS TECH INC

Deflecting acceleration/deceleration gap

High mass resolution magnet for ribbon beam ion implanters

Beam tuning with automatic magnet pole rotation for ion implanters

Hybrid magnetic/electrostatic deflector for ion implantation systems

High mass resolution magnet for ribbon beam ion implanters

Deceleration electrode configuration for ultra-low energy ion implanter

Charged beam dump and particle attractor

Extraction electrode system for high current ion implanter

Method of tuning electrostatic quadrupole electrodes of an ion beam implanter

Ion source arc chamber seal

System and method of ion beam control in response to a beam glitch

Method of reducing particle contamination for ion implanters

Low contamination, low energy beamline architecture for high current ion implantation

High conductance ion source

Method and system for ion beam profiling

Beam stop and beam tuning methods

Closed loop dose control for ion implantation

HUANG YONGZHANG

High mass resolution low aberration analyzer magnet for ribbon beams and the system for ribbon beam ion implanter