Inventor
FREER BRIAN S
US10 patents
⚠️ This page may combine multiple inventors who share the name “FREER BRIAN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
6 patentsUS6221169B1Apr 24, 2001
System and method for cleaning contaminated surfaces in an ion implanter
AXCELIS TECH INC64 citations94
US6828572B2Dec 7, 2004
Ion beam incident angle detector for ion implant systems
AXCELIS TECH INC31 citations90
US7435977B2Oct 14, 2008
Ion beam angle measurement systems and methods for ion implantation systems
AXCELIS TECH INC7 citations73
US7598495B2Oct 6, 2009
Methods and systems for trapping ion beam particles and focusing an ion beam
AXCELIS TECH INC2 citations62
US7557363B2Jul 7, 2009
Closed loop dose control for ion implantation
AXCELIS TECH INC0 citations50
US7476876B2Jan 13, 2009
Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems
AXCELIS TECH INC0 citations50