Inventor

GRAF MICHAEL A

US18 patents

⚠️ This page may combine multiple inventors who share the name “GRAF MICHAEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GRAF MICHAEL A

AXCELIS TECH INC

Ion implantation control using charge collection, optical emission spectroscopy and mass analysis

Ion beam utilization during scanned ion implantation

Electrostatic trap for particles entrained in an ion beam

System and method for removing contaminant particles relative to an ion beam

Ion beam incident angle detector for ion implant systems

System and method for two-dimensional beam scan across a workpiece of an ion implanter

Scanning systems and methods for providing ions from an ion beam to a workpiece

Methods for rapidly switching off an ion beam

Modulating ion beam current

Methods and systems for trapping ion beam particles and focusing an ion beam

Method and system for ion beam profiling

Ribbon beam ion implanter cluster tool

Ion beam monitoring in an ion implanter using an imaging device

Closed loop dose control for ion implantation

EATON CORP

Method for in-process cleaning of an ion source

(unassigned)

Mechanism for prevention of neutron radiation in ion implanter beamline

DIVERGILIO WILLIAM F

Hybrid ion source/multimode ion source

GRAF MICHAEL A

Methods for beam current modulation by ion source parameter modulation