Inventor
GOUNDAR KAMAL KISHORE
JP10 patents
⚠️ This page may combine multiple inventors who share the name “GOUNDAR KAMAL KISHORE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM JAPAN
9 patentsUS7632549B2Dec 15, 2009
Method of forming a high transparent carbon film
ASM JAPAN520 citations98
US6849561B1Feb 1, 2005
Method of forming low-k films
ASM JAPAN59 citations95
US6991959B2Jan 31, 2006
Method of manufacturing silicon carbide film
ASM JAPAN32 citations92
US6919270B2Jul 19, 2005
Method of manufacturing silicon carbide film
ASM JAPAN29 citations92
US7138332B2Nov 21, 2006
Method of forming silicon carbide films
ASM JAPAN18 citations83
US7091133B2Aug 15, 2006
Two-step formation of etch stop layer
ASM JAPAN7 citations68
US7410915B2Aug 12, 2008
Method of forming carbon polymer film using plasma CVD
ASM JAPAN6 citations62
US7238393B2Jul 3, 2007
Method of forming silicon carbide films
ASM JAPAN2 citations59
US7638441B2Dec 29, 2009
Method of forming a carbon polymer film using plasma CVD
ASM JAPAN1 citations52