Inventor

BURGESS STEPHEN ROBERT

GB6 patents

⚠️ This page may combine multiple inventors who share the name “BURGESS STEPHEN ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TRIKON HOLDINGS LTD

2 patents

US6660140B2Dec 9, 2003

Sputtering apparatus

TRIKON HOLDINGS LTD8 citations70

US6933099B2Aug 23, 2005

Method of forming a patterned metal layer

TRIKON HOLDINGS LTD3 citations56

AVIZA TECHNOLOGY LTD

2 patents

US7282158B2Oct 16, 2007

Method of processing a workpiece

AVIZA TECHNOLOGY LTD4 citations60

US7732307B2Jun 8, 2010

Method of forming amorphous TiN by thermal chemical vapor deposition (CVD)

AVIZA TECHNOLOGY LTD0 citations46

AVIZA EUROP LTD

1 patent

US7378001B2May 27, 2008

Magnetron sputtering

AVIZA EUROP LTD7 citations62

TRIKON TECHNOLOGIES LTD

1 patent

US6860975B2Mar 1, 2005

Barrier layer and method of depositing a barrier layer

TRIKON TECHNOLOGIES LTD4 citations56