Inventor
FERRARA JOSEPH
US24 patents
⚠️ This page may combine multiple inventors who share the name “FERRARA JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
18 patentsUS7246985B2Jul 24, 2007
Work-piece processing system
AXCELIS TECH INC40 citations92
US6992309B1Jan 31, 2006
Ion beam measurement systems and methods for ion implant dose and uniformity control
AXCELIS TECH INC34 citations92
US7949425B2May 24, 2011
High throughput wafer notch aligner
AXCELIS TECH INC18 citations84
US7750320B2Jul 6, 2010
System and method for two-dimensional beam scan across a workpiece of an ion implanter
AXCELIS TECH INC10 citations84
US7699574B2Apr 20, 2010
Work-piece processing system
AXCELIS TECH INC10 citations84
US6992310B1Jan 31, 2006
Scanning systems and methods for providing ions from an ion beam to a workpiece
AXCELIS TECH INC18 citations84
US6710360B2Mar 23, 2004
Adjustable implantation angle workpiece support structure for an ion beam implanter
AXCELIS TECH INC19 citations84
US9378992B2Jun 28, 2016
High throughput heated ion implantation system and method
AXCELIS TECH INC7 citations81
US6900444B2May 31, 2005
Adjustable implantation angle workpiece support structure for an ion beam implanter
AXCELIS TECH INC15 citations81
US7276712B2Oct 2, 2007
Method and apparatus for scanning a workpiece in a vacuum chamber of an ion beam implanter
AXCELIS TECH INC8 citations73
US7112808B2Sep 26, 2006
Wafer 2D scan mechanism
AXCELIS TECH INC7 citations72
US10041789B2Aug 7, 2018
Integrated emissivity sensor alignment characterization
AXCELIS TECH INC3 citations71
US11728187B2Aug 15, 2023
Method for decreasing cool down time with heated system for semiconductor manufacturing equipment
AXCELIS TECH INC2 citations69
US11670483B2Jun 6, 2023
High power wafer cooling
AXCELIS TECH INC0 citations62
US6774373B2Aug 10, 2004
Adjustable implantation angle workpiece support structure for an ion beam implanter
AXCELIS TECH INC2 citations62
US7375355B2May 20, 2008
Ribbon beam ion implanter cluster tool
AXCELIS TECH INC2 citations60
US9607803B2Mar 28, 2017
High throughput cooled ion implantation system and method
AXCELIS TECH INC1 citations49
US10832926B2Nov 10, 2020
High throughput serial wafer handling end station
AXCELIS TECH INC0 citations41