Inventor
SU WEI-YU
TW7 patents
⚠️ This page may combine multiple inventors who share the name “SU WEI-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
6 patentsUS6869733B1Mar 22, 2005
Pellicle with anti-static/dissipative material coating to prevent electrostatic damage on masks
TAIWAN SEMICONDUCTOR MFG34 citations89
US7029800B2Apr 18, 2006
Reticle with antistatic coating
TAIWAN SEMICONDUCTOR MFG13 citations82
US6948619B2Sep 27, 2005
Reticle pod and reticle with cut areas
TAIWAN SEMICONDUCTOR MFG18 citations78
US7796249B2Sep 14, 2010
Mask haze early detection
TAIWAN SEMICONDUCTOR MFG5 citations62
US7514184B2Apr 7, 2009
Reticle with antistatic coating
TAIWAN SEMICONDUCTOR MFG0 citations50
US7968258B2Jun 28, 2011
System and method for photolithography in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG0 citations40