Inventor
HAUSCHILD JAN
NL7 patents
Patents
7 patentsUS7502096B2Mar 10, 2009
Lithographic apparatus, calibration method, device manufacturing method and computer program product
ASML NETHERLANDS BV7 citations67
US7834975B2Nov 16, 2010
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly
ASML NETHERLANDS BV2 citations61
US7518706B2Apr 14, 2009
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly
ASML NETHERLANDS BV5 citations61
US7502097B2Mar 10, 2009
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly
ASML NETHERLANDS BV5 citations59
US7298455B2Nov 20, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations58
US7355675B2Apr 8, 2008
Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
ASML NETHERLANDS BV3 citations53
US7209214B2Apr 24, 2007
Lithographic apparatus focus test method and system, and device manufacturing method
ASML NETHERLANDS BV0 citations40