Inventor
VANNEER ROELAND NICOLAAS MARIA
NL6 patents
⚠️ This page may combine multiple inventors who share the name “VANNEER ROELAND NICOLAAS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7116401B2Oct 3, 2006
Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing method
ASML NETHERLANDS BV49 citations91
US7834975B2Nov 16, 2010
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly
ASML NETHERLANDS BV2 citations61
US7518706B2Apr 14, 2009
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly
ASML NETHERLANDS BV5 citations61
US6987555B2Jan 17, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations60
US7280228B2Oct 9, 2007
System and method of measurement, system and method of alignment, lithographic apparatus and method
ASML NETHERLANDS BV0 citations47