Inventor
LIN CHENG-YU SEAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “LIN CHENG-YU SEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KHOLODENKO ARNOLD
7 patentsUS8757177B2Jun 24, 2014
Multi-stage substrate cleaning method and apparatus
KHOLODENKO ARNOLD6 citations82
US8317934B2Nov 27, 2012
Multi-stage substrate cleaning method and apparatus
KHOLODENKO ARNOLD10 citations82
US8557051B2Oct 15, 2013
Method for using generator for foam to clean substrate
KHOLODENKO ARNOLD0 citations51
US8317966B2Nov 27, 2012
Apparatus for substantially uniform fluid flow rates relative to a proximity head in processing of a wafer surface by a meniscus
KHOLODENKO ARNOLD0 citations51
US8161984B2Apr 24, 2012
Generator for foam to clean substrate
KHOLODENKO ARNOLD1 citations51
US8246755B2Aug 21, 2012
In situ morphological characterization of foam for a proximity head
KHOLODENKO ARNOLD0 citations41
US8739805B2Jun 3, 2014
Confinement of foam delivered by a proximity head
KHOLODENKO ARNOLD0 citations38
LAM RES CORP
3 patentsUS8900400B2Dec 2, 2014
Proximity head having a fluid resistor
LAM RES CORP1 citations51
US7849554B2Dec 14, 2010
Apparatus and system for cleaning substrate
LAM RES CORP0 citations50
US7998304B2Aug 16, 2011
Methods of configuring a proximity head that provides uniform fluid flow relative to a wafer
LAM RES CORP0 citations41