Inventor
WILCOXSON MARK
US20 patents
⚠️ This page may combine multiple inventors who share the name “WILCOXSON MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS9673058B1Jun 6, 2017
Method for etching features in dielectric layers
LAM RES CORP24 citations92
US7239737B2Jul 3, 2007
User interface for quantifying wafer non-uniformities and graphically explore significance
LAM RES CORP36 citations92
US7632376B1Dec 15, 2009
Method and apparatus for atomic layer deposition (ALD) in a proximity system
LAM RES CORP15 citations84
US7329321B2Feb 12, 2008
Enhanced wafer cleaning method
LAM RES CORP13 citations83
US7597765B2Oct 6, 2009
Post etch wafer surface cleaning with liquid meniscus
LAM RES CORP7 citations73
US7946303B2May 24, 2011
Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus
LAM RES CORP4 citations72
US8021512B2Sep 20, 2011
Method of preventing premature drying
LAM RES CORP4 citations62
US7568488B2Aug 4, 2009
Enhanced wafer cleaning method
LAM RES CORP3 citations62
US7758404B1Jul 20, 2010
Apparatus for cleaning edge of substrate and method for using the same
LAM RES CORP6 citations59
US7939139B2May 10, 2011
Methods for atomic layer deposition (ALD) using a proximity meniscus
LAM RES CORP0 citations52
US7849554B2Dec 14, 2010
Apparatus and system for cleaning substrate
LAM RES CORP0 citations50