Inventor
GINZBURG LEON
US6 patents
⚠️ This page may combine multiple inventors who share the name “GINZBURG LEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KHOLODENKO ARNOLD
4 patentsUS8757177B2Jun 24, 2014
Multi-stage substrate cleaning method and apparatus
KHOLODENKO ARNOLD6 citations82
US8317934B2Nov 27, 2012
Multi-stage substrate cleaning method and apparatus
KHOLODENKO ARNOLD10 citations82
US8584613B2Nov 19, 2013
Single substrate processing head for particle removal using low viscosity fluid
KHOLODENKO ARNOLD2 citations60
US8739805B2Jun 3, 2014
Confinement of foam delivered by a proximity head
KHOLODENKO ARNOLD0 citations38