Inventor
KAWAKAMI SATORU
JP48 patents
⚠️ This page may combine multiple inventors who share the name “KAWAKAMI SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
36 patentsUS5542559AAug 6, 1996
Plasma treatment apparatus
TOKYO ELECTRON LTD254 citations99
US6399520B1Jun 4, 2002
Semiconductor manufacturing method and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD175 citations98
US5665166ASep 9, 1997
Plasma processing apparatus
TOKYO ELECTRON LTD190 citations98
US5478429ADec 26, 1995
Plasma process apparatus
TOKYO ELECTRON LTD473 citations98
US5665167ASep 9, 1997
Plasma treatment apparatus having a workpiece-side electrode grounding circuit
TOKYO ELECTRON LTD134 citations97
US6558508B1May 6, 2003
Processing apparatus having dielectric plates linked together by electrostatic force
TOKYO ELECTRON LTD71 citations96
US5494522AFeb 27, 1996
Plasma process system and method
TOKYO ELECTRON LTD90 citations95
US6470824B2Oct 29, 2002
Semiconductor manufacturing apparatus
TOKYO ELECTRON LTD26 citations92
US6358324B1Mar 19, 2002
Microwave plasma processing apparatus having a vacuum pump located under a susceptor
TOKYO ELECTRON LTD31 citations92
US6161498ADec 19, 2000
Plasma processing device and a method of plasma process
TOKYO ELECTRON LTD40 citations92
US6432208B1Aug 13, 2002
Plasma processing apparatus
TOKYO ELECTRON LTD42 citations91
US6066568AMay 23, 2000
Plasma treatment method and system
TOKYO ELECTRON LTD21 citations91
US11923170B2Mar 5, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD6 citations75
US6501082B1Dec 31, 2002
Plasma deposition apparatus and method with controller
TOKYO ELECTRON LTD13 citations74
US6284674B1Sep 4, 2001
Plasma processing device and a method of plasma process
TOKYO ELECTRON LTD8 citations73
US9305751B2Apr 5, 2016
Microwave plasma processing apparatus and microwave supplying method
TOKYO ELECTRON LTD4 citations72
US6452400B1Sep 17, 2002
Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same
TOKYO ELECTRON LTD7 citations72
US6431114B1Aug 13, 2002
Method and apparatus for plasma processing
TOKYO ELECTRON LTD8 citations72
US12148637B2Nov 19, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations63
US12051564B2Jul 30, 2024
Shower plate, plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations63
US12482635B2Nov 25, 2025
Plasma processing device, and plasma processing method
TOKYO ELECTRON LTD0 citations62
US12412732B2Sep 9, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US12020900B2Jun 25, 2024
Plasma processing device, and plasma processing method
TOKYO ELECTRON LTD0 citations62
US11538667B2Dec 27, 2022
Stage, plasma processing apparatus, and plasma processing method
TOKYO ELECTRON LTD0 citations62
US12362151B2Jul 15, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations60
US12482637B2Nov 25, 2025
Plasma source and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US12456609B2Oct 28, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US12451326B2Oct 21, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations52
US12261025B2Mar 25, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US12217941B2Feb 4, 2025
Plasma processing apparatus, and plasma processing method
TOKYO ELECTRON LTD0 citations52
US12046455B2Jul 23, 2024
Shower plate, lower dielectric member and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11929234B2Mar 12, 2024
Plasma processing apparatus and lower stage
TOKYO ELECTRON LTD0 citations52
US9633821B2Apr 25, 2017
Microwave plasma processing apparatus and microwave supplying method
TOKYO ELECTRON LTD0 citations51
US12362143B2Jul 15, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations50
US12283465B2Apr 22, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations47
US10570512B2Feb 25, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations41
TOYOTA MOTOR CO LTD
3 patentsUS12351204B2Jul 8, 2025
Monitoring system, storage medium storing computer program for monitoring and method for monitoring
TOYOTA MOTOR CO LTD0 citations59
US12534088B2Jan 27, 2026
Distraction judgment device, distraction judgment method, and nontransitory computer storage medium
TOYOTA MOTOR CO LTD0 citations49
US12466316B2Nov 11, 2025
Notification control device and notification control method
TOYOTA MOTOR CO LTD0 citations49