P

Inventor

MURAKAWA SHIGEMI

JP11 patents
⚠️ This page may combine multiple inventors who share the name “MURAKAWA SHIGEMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents
US6399520B1Jun 4, 2002

Semiconductor manufacturing method and semiconductor manufacturing apparatus

TOKYO ELECTRON LTD175 citations98
US6897149B2May 24, 2005

Method of producing electronic device material

TOKYO ELECTRON LTD24 citations92
US6470824B2Oct 29, 2002

Semiconductor manufacturing apparatus

TOKYO ELECTRON LTD26 citations92
US7217659B2May 15, 2007

Process for producing materials for electronic device

TOKYO ELECTRON LTD5 citations73
US7374635B2May 20, 2008

Forming method and forming system for insulation film

TOKYO ELECTRON LTD3 citations61
US7166185B2Jan 23, 2007

Forming system for insulation film

TOKYO ELECTRON LTD2 citations61

KAWASAKI STEEL CO

3 patents
US5518572AMay 21, 1996

Plasma processing system and method

KAWASAKI STEEL CO126 citations97
US4697453AOct 6, 1987

Apparatus for monitoring burden distribution in furnace

KAWASAKI STEEL CO12 citations71
US4914948AApr 10, 1990

Apparatus for monitoring burden distribution in furnace

KAWASAKI STEEL CO6 citations60

MURAKAWA SHIGEMI

1 patent
US10480073B2Nov 19, 2019

Rotating semi-batch ALD device

MURAKAWA SHIGEMI9 citations78

OHMI TADAHIRO

1 patent
US8573151B2Nov 5, 2013

Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window

OHMI TADAHIRO3 citations61