Inventor
YUASA MITSUHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “YUASA MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6399520B1Jun 4, 2002
Semiconductor manufacturing method and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD175 citations98
US7101797B2Sep 5, 2006
Substrate processing device and processing method
TOKYO ELECTRON LTD55 citations95
US7180425B2Feb 20, 2007
Drop detection device or abnormality detection device and portable apparatus equipped with said device
TOKYO ELECTRON LTD33 citations92
US6470824B2Oct 29, 2002
Semiconductor manufacturing apparatus
TOKYO ELECTRON LTD26 citations92
US6358324B1Mar 19, 2002
Microwave plasma processing apparatus having a vacuum pump located under a susceptor
TOKYO ELECTRON LTD31 citations92
US6737812B2May 18, 2004
Plasma processing apparatus
TOKYO ELECTRON LTD29 citations91
US7029801B2Apr 18, 2006
Method of manufacturing mask for electron beam lithography and mask blank for electron beam lithography
TOKYO ELECTRON LTD2 citations62
US8010228B2Aug 30, 2011
Process monitoring apparatus and method for monitoring process
TOKYO ELECTRON LTD0 citations51
US7303928B2Dec 4, 2007
Process monitor and system for producing semiconductor
TOKYO ELECTRON LTD0 citations51
US7072798B2Jul 4, 2006
Semiconductor fabricating apparatus
TOKYO ELECTRON LTD1 citations51
US7237606B2Jul 3, 2007
Wafer supporter
TOKYO ELECTRON LTD1 citations48