Inventor
HONGOH TOSHIAKI
JP15 patents
Patents
15 patentsUS6399520B1Jun 4, 2002
Semiconductor manufacturing method and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD175 citations98
US5525159AJun 11, 1996
Plasma process apparatus
TOKYO ELECTRON LTD194 citations98
US5792261AAug 11, 1998
Plasma process apparatus
TOKYO ELECTRON LTD94 citations97
US5179498AJan 12, 1993
Electrostatic chuck device
TOKYO ELECTRON LTD97 citations96
US5716451AFeb 10, 1998
Plasma processing apparatus
TOKYO ELECTRON LTD116 citations95
US7018506B2Mar 28, 2006
Plasma processing apparatus
TOKYO ELECTRON LTD20 citations92
US6736930B1May 18, 2004
Microwave plasma processing apparatus for controlling a temperature of a wavelength reducing member
TOKYO ELECTRON LTD23 citations92
US6470824B2Oct 29, 2002
Semiconductor manufacturing apparatus
TOKYO ELECTRON LTD26 citations92
US6358324B1Mar 19, 2002
Microwave plasma processing apparatus having a vacuum pump located under a susceptor
TOKYO ELECTRON LTD31 citations92
US6343565B1Feb 5, 2002
Flat antenna having rounded slot openings and plasma processing apparatus using the flat antenna
TOKYO ELECTRON LTD31 citations92
US6325018B1Dec 4, 2001
Flat antenna having openings provided with conductive materials accommodated therein and plasma processing apparatus using the flat antenna
TOKYO ELECTRON LTD42 citations92
USRE39020EMar 21, 2006
Plasma process apparatus
TOKYO ELECTRON LTD12 citations84
US6797111B2Sep 28, 2004
Plasma processing apparatus
TOKYO ELECTRON LTD17 citations83
US6675737B2Jan 13, 2004
Plasma processing apparatus
TOKYO ELECTRON LTD10 citations74
US7569497B2Aug 4, 2009
Method and apparatus for forming insulating layer
TOKYO ELECTRON LTD0 citations51