Inventor
OHTOSHI KENJI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OHTOSHI KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
8 patentsUS7679068B2Mar 16, 2010
Method of calculating deflection aberration correcting voltage and charged particle beam writing method
NUFLARE TECHNOLOGY INC8 citations83
US9466461B2Oct 11, 2016
Rotation angle measuring method of multi-charged particle beam image, rotation angle adjustment method of multi-charged particle beam image, and multi-charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC3 citations71
US9190245B2Nov 17, 2015
Charged particle beam writing apparatus, and charged particle beam writing method
NUFLARE TECHNOLOGY INC6 citations70
US7476881B2Jan 13, 2009
Charged beam drawing apparatus and charged beam drawing method
NUFLARE TECHNOLOGY INC3 citations59
US9653262B2May 16, 2017
Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC1 citations51
US9472372B2Oct 18, 2016
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations49
US8008631B2Aug 30, 2011
Method of acquiring offset deflection amount for shaped beam and lithography apparatus
NUFLARE TECHNOLOGY INC1 citations49
US7521689B2Apr 21, 2009
Deflector for equipment of electron beam lithography and equipment of electron beam lithography
NUFLARE TECHNOLOGY INC0 citations45