Inventor
THAN Y ROBERTO
US6 patents
⚠️ This page may combine multiple inventors who share the name “THAN Y ROBERTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
4 patentsUS7127901B2Oct 31, 2006
Helium management control system
BROOKS AUTOMATION INC23 citations92
US7788942B2Sep 7, 2010
Helium management control system
BROOKS AUTOMATION INC10 citations91
US10288052B2May 14, 2019
Helium management control system
BROOKS AUTOMATION INC4 citations83
US9334859B2May 10, 2016
Helium management control system
BROOKS AUTOMATION INC7 citations83