Inventor

CLARK ROBERT D

US77 patents

⚠️ This page may combine multiple inventors who share the name “CLARK ROBERT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CLARK ROBERT D

TOKYO ELECTRON LTD

Nitrogen profile engineering in nitrided high dielectric constant films

Method for forming strained silicon nitride films and a device containing such films

Method of enhancing high-k film nucleation rate and electrical mobility in a semiconductor device by microwave plasma treatment

Method for forming strained silicon nitride films and a device containing such films

Semiconductor device containing a buried threshold voltage adjustment layer and method of forming

Strained metal silicon nitride films and method of forming

Atomic layer etching using a boron-containing gas and hydrogen fluoride gas

Hybrid gate last integration scheme for multi-layer high-k gate stacks

Method of integrating stress into a gate stack

Method of forming crystallographically stabilized doped hafnium zirconium based films

Method of forming high dielectric constant films using a plurality of oxidation sources

Semiconductor device with gate dielectric containing aluminum and mixed rare earth elements

Semiconductor device containing crystallographically stabilized doped hafnium zirconium based materials

Strained metal nitride films and method of forming

Strained metal silicon nitride films and method of forming

Method of controlling interface layer thickness in high dielectric constant film structures including growing and annealing a chemical oxide layer

Selective bottom-up metal feature filling for interconnects

Sidewall protection scheme for contact formation

Solid source doping for source and drain extension doping

Method of controlling solid phase diffusion of boron dopants to form ultra-shallow doping regions

Barrier schemes for metallization using manganese and graphene

Ultra-shallow dopant and ohmic contact regions by solid state diffusion

Bonding layer and process of making

Replacement channel 2D material integration

Crystalline dielectric systems for interconnect circuit manufacturing

Semiconductor device having channel structure with 2D material

Method for forming ultra-shallow boron doping regions by solid phase diffusion

Method of forming mixed rare earth nitride and aluminum nitride films by atomic layer deposition

Method of forming high-dielectric constant films for semiconductor devices

Semiconductor device with gate dielectric containing mixed rare earth elements

Interconnect structure and method of forming the same

CLARK ROBERT D

Method for forming ultra-shallow boron doping regions by solid phase diffusion

Epitaxial film growth in retrograde wells for semiconductor devices

Liquid pressure opened pouring spout

Method for forming ultra-shallow doping regions by solid phase diffusion

Method for forming ultra-shallow doping regions by solid phase diffusion

Method for forming a high-K gate stack with reduced effective oxide thickness

Toilet mounting assembly

Method of integrating buried threshold voltage adjustment layers for CMOS processing

Diffused cap layers for modifying high-k gate dielectrics and interface layers

Method for depositing dielectric films

Semiconductor device containing a buried threshold voltage adjustment layer and method of forming

Method of forming mixed rare earth oxynitride and aluminum oxynitride films by atomic layer deposition

TRIPOS INC

Method for selecting an optimally diverse library of small molecules based on validated molecular structural descriptors

Optimal dissimilarity method for choosing distinctive items of information from a large body of information

Method for selecting an optimally diverse library of small molecules based on validated molecular structural descriptors

AIR PROD & CHEM

Process of CVD of Hf and Zr containing oxynitride films

Single source mixtures of metal siloxides

(unassigned)

Push opened valve for dispensing liquids

XEROX CORP

Precision speed control for optical scanners