Inventor
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS
NL13 patents
⚠️ This page may combine multiple inventors who share the name “DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7900641B2Mar 8, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV12 citations82
US7866330B2Jan 11, 2011
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
ASML NETHERLANDS BV9 citations82
US7841352B2Nov 30, 2010
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
ASML NETHERLANDS BV9 citations82
US9599908B2Mar 21, 2017
Lithographic apparatus and contamination removal or prevention method
ASML NETHERLANDS BV1 citations60
US7916269B2Mar 29, 2011
Lithographic apparatus and contamination removal or prevention method
ASML NETHERLANDS BV3 citations60
US8011377B2Sep 6, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV1 citations50
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS
5 patentsUS9158206B2Oct 13, 2015
Lithographic apparatus and contamination removal or prevention method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS1 citations59
US8339572B2Dec 25, 2012
Lithographic apparatus and device manufacturing method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations49
US9289802B2Mar 22, 2016
Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations48
US9013672B2Apr 21, 2015
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations48
US8947629B2Feb 3, 2015
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations38