Inventor
UENO YOSHIFUMI
JP56 patents
⚠️ This page may combine multiple inventors who share the name “UENO YOSHIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
24 patentsUS9888555B2Feb 6, 2018
Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system
GIGAPHOTON INC7 citations84
US8710475B2Apr 29, 2014
Extreme ultraviolet light source device and method for generating extreme ultraviolet light
GIGAPHOTON INC7 citations84
US10303061B2May 28, 2019
Extreme ultraviolet light generation device
GIGAPHOTON INC5 citations73
US10268118B2Apr 23, 2019
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC3 citations73
US10111312B2Oct 23, 2018
Extreme ultraviolet light generation device
GIGAPHOTON INC2 citations73
US10271414B2Apr 23, 2019
Droplet detector and extreme ultraviolet light generating apparatus
GIGAPHOTON INC2 citations72
US10057972B2Aug 21, 2018
Extreme ultraviolet light generation system and method of generating extreme ultraviolet light
GIGAPHOTON INC5 citations72
US10667376B2May 26, 2020
Target supply device, extreme ultraviolet light generation device, and target supply method
GIGAPHOTON INC3 citations71
US11553583B2Jan 10, 2023
Extreme ultraviolet light generation system and electronic device manufacturing method
GIGAPHOTON INC0 citations62
US10609803B2Mar 31, 2020
Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light
GIGAPHOTON INC1 citations62
US10455679B2Oct 22, 2019
Extreme ultraviolet light generation device
GIGAPHOTON INC1 citations62
US8604453B2Dec 10, 2013
Extreme ultraviolet light source apparatus and method of generating ultraviolet light
GIGAPHOTON INC1 citations62
US11940736B2Mar 26, 2024
Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations61
US10955751B2Mar 23, 2021
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC1 citations61
US12532401B2Jan 20, 2026
EUV light generation system and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US12455231B2Oct 28, 2025
EUV light generation apparatus, electronic device manufacturing method, and inspection method
GIGAPHOTON INC0 citations52
US11043784B2Jun 22, 2021
Laser apparatus and EUV light generation system
GIGAPHOTON INC0 citations52
US9872372B2Jan 16, 2018
Extreme ultraviolet light generation device
GIGAPHOTON INC0 citations52
US9192037B2Nov 17, 2015
Control method for target supply device, and target supply device
GIGAPHOTON INC1 citations52
US8841639B2Sep 23, 2014
Control method for target supply device, and target supply device
GIGAPHOTON INC1 citations52
US11219116B1Jan 4, 2022
Extreme ultraviolet light generation system and electronic device manufacturing method
GIGAPHOTON INC0 citations51
US11228156B2Jan 18, 2022
Laser system and extreme ultraviolet light generation system
GIGAPHOTON INC0 citations50
US8354657B2Jan 15, 2013
Extreme ultra violet light source apparatus
GIGAPHOTON INC0 citations48
US10375809B2Aug 6, 2019
Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device
GIGAPHOTON INC0 citations45
UENO YOSHIFUMI
5 patentsUS8067756B2Nov 29, 2011
Extreme ultraviolet light source apparatus
UENO YOSHIFUMI24 citations92
US8129700B2Mar 6, 2012
Optical element contamination preventing method and optical element contamination preventing device of extreme ultraviolet light source
UENO YOSHIFUMI7 citations84
US8492738B2Jul 23, 2013
Apparatus for and method of withdrawing ions in EUV light production apparatus
UENO YOSHIFUMI6 citations83
US8513630B2Aug 20, 2013
Extreme ultraviolet light source apparatus
UENO YOSHIFUMI2 citations62
US8288743B2Oct 16, 2012
Apparatus for and method of withdrawing ions in EUV light production apparatus
UENO YOSHIFUMI4 citations62
KOMATSU MFG CO LTD
5 patentsUS7915600B2Mar 29, 2011
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD22 citations92
US7095773B2Aug 22, 2006
Injection locking type or MOPA type of laser device
KOMATSU MFG CO LTD5 citations73
US7732794B2Jun 8, 2010
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD6 citations63
US7230966B2Jun 12, 2007
Injection locking type or MOPA type of laser device
KOMATSU MFG CO LTD3 citations62
US7499482B2Mar 3, 2009
Injection locking type or MOPA type of laser device
KOMATSU MFG CO LTD0 citations51
SONY CHEMICALS CORP
4 patentsUS6777622B2Aug 17, 2004
Wiring boards
SONY CHEMICALS CORP20 citations86
US6333095B1Dec 25, 2001
Flame-retardant adhesive film and flat cable
SONY CHEMICALS CORP16 citations83
US6764765B2Jul 20, 2004
Fire-retardant adhesive, fire-retardant adhesive film using the same, and flat cable
SONY CHEMICALS CORP2 citations61
US6696133B2Feb 24, 2004
Wiring boards and processes for manufacturing wiring boards
SONY CHEMICALS CORP6 citations54
ENDO AKIRA
3 patentsUS8399867B2Mar 19, 2013
Extreme ultraviolet light source apparatus
ENDO AKIRA7 citations84
US8164076B2Apr 24, 2012
Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light
ENDO AKIRA9 citations83
US8455850B2Jun 4, 2013
Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light
ENDO AKIRA4 citations62
KOMORI HIROSHI
3 patentsUS8143606B2Mar 27, 2012
Extreme ultra violet light source device
KOMORI HIROSHI13 citations83
US8586953B2Nov 19, 2013
Extreme ultra violet light source device
KOMORI HIROSHI4 citations61
US8471226B2Jun 25, 2013
Extreme ultraviolet light source device and method for producing extreme ultraviolet light
KOMORI HIROSHI1 citations51
SONY CORP
1 patentSONY CHEM & INF DEVICE CORP
1 patentMORIYA MASATO
1 patentGIGAHOTON INC
1 patentITO YASUSHI
1 patentDEXERIALS CORP
1 patentShowing the top 50 of 56 patents by PatentIndex Score.