P

Inventor

SASAKI YOUICHI

JP9 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI YOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC ELECTRONICS CORP

3 patents
US7420279B2Sep 2, 2008

Carbon containing silicon oxide film having high ashing tolerance and adhesion

NEC ELECTRONICS CORP13 citations81
US7102236B2Sep 5, 2006

Carbon containing silicon oxide film having high ashing tolerance and adhesion

NEC ELECTRONICS CORP6 citations70
US7582970B2Sep 1, 2009

Carbon containing silicon oxide film having high ashing tolerance and adhesion

NEC ELECTRONICS CORP0 citations47

ENDO AKIRA

2 patents
US8164076B2Apr 24, 2012

Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light

ENDO AKIRA9 citations83
US8455850B2Jun 4, 2013

Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light

ENDO AKIRA4 citations62

GIGAPHOTON INC

2 patents
US8604453B2Dec 10, 2013

Extreme ultraviolet light source apparatus and method of generating ultraviolet light

GIGAPHOTON INC1 citations62
US6922428B2Jul 26, 2005

Gas laser apparatus for lithography

GIGAPHOTON INC2 citations62

ISHIHARA TAKANOBU

1 patent
US8710472B2Apr 29, 2014

Target output device and extreme ultraviolet light source apparatus

ISHIHARA TAKANOBU3 citations60

GIGAPHOTON

1 patent
US7215695B2May 8, 2007

Discharge excitation type pulse laser apparatus

GIGAPHOTON4 citations57